Sputter Coaters / Vacuum Coating Systems - Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300
Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300
Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is equipped with a large chamber, making it perfect for preparing samples for FE-SEM, EDS/WDS, TEM, EBSD analysis, and thin film applications. This coater operates under high vacuum conditions, ensuring the deposition of uniform carbon and metal films with fine grain sizes. These features make it ideal for specimens that demand high-resolution and high-quality characterization.
The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 features a cylindrical chamber with a diameter of 300 mm, enabling long-term deposition on samples up to 15 cm in diameter or multiple small specimens. Its fully automatic programmable carbon coating process ensures easy, precise, and repeatable performance.
Additionally, this coating machine offers the advantage of thermal evaporation of low melting point materials in two directions – upward or downward. The distance between the thermal source and the substrate is adjustable, further enhancing its versatility.
The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 facilitates the deposition of carbon films tailored for SEM, FE-SEM, EDX, and TEM sample preparation. It also supports the creation of conductive layers. Additionally, users have the option to perform TEM grid plasma treatment for enhanced hydrophilicity. Furthermore, the system enables TEM aperture cleaning utilizing the thermal source holder.
Hardware
Automation
Pulsed Carbon Fiber Evaporation
The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 system can carry out pulsed carbon fiber evaporation. Short pulses offer greater control over deposition, substantially minimizing the debris typically associated with conventional carbon deposition methods.
Carbon Rod Evaporation (Optional)
This benchtop coating system can be optionally equipped with a carbon rod head. In such instances, an external 0-100 A high current power supply is required instead of the internal high current power supply intended for carbon fiber evaporation.
Thermal Evaporation
Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is outfitted with a high-current power supply and a low-voltage (resistive) thermal evaporation platform, making it suitable for a diverse array of thermal evaporation applications. The system enables precise control over the thermal evaporation of a broad spectrum of materials onto the substrate. Additionally, various types of thermal evaporation sources, including boats, baskets, and coils, can be installed on the single thermal source holder for added versatility.
Clean Vacuum
The vacuum chamber of the Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 is constructed from cylindrical Pyrex glass, with dimensions of 300 mm outer diameter and 200 mm height. It is equipped with an internally mounted turbo molecular pump, supplemented by an optional 6 m3/h two-stage rotary vane pump. This configuration ensures the introduction of clean vacuum conditions without the oil contamination typically associated with conventional diffusion pumps.
Touch Screen Control
Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 features a 7-inch colored touch screen that enables full automatic control through user-friendly software, facilitating precise adjustment of the deposition process parameters. Users can monitor vacuum levels and coating sequences either as digital data or as curves directly on the touch screen interface. The system also stores information on the last 300 coatings, accessible through the history page, and allows for easy transfer to a PC via a USB port located on the device.
Sample Holder Stages
The Turbo Pumped Carbon Coater and Thermal Evaporator – DCT-T-300 offers various customized sample stage configurations to meet diverse user needs. The standard sample rotation stages are rotatable and feature adjustable height and angle, ensuring ease of use and versatility. Additionally, users have the option to include a rotary planetary sample stage, which is ideal for achieving uniform coatings on porous specimens.
For deposition on larger samples, an optional 6-inch rotatable sample holder stage is recommended. While this stage does not include incline adjustment, it provides ample space for accommodating sizable samples.
Standard Sample Holder
Planetary Sample Holder
6-inch Rotatable Sample Holder Stage
The Turbo Pumped Carbon Coater and Thermal Evaporator offers an optional turbo molecular pump with various pumping speeds, enhancing its performance capabilities. Key specifications include:
|
Pumping Speed |
90 l/s |
250 l/s |
350 l/s |
|
Ultimate Pressure |
8×10-6 |
3×10-6 |
8×10-7 |
Options and Accessories
The Turbo Pumped Carbon Coater and Thermal Evaporator system includes the following components and accessories:
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