Automatic Matching Network (25KV)
Automatic Matching Network (25KV) control adjusts the RF-generated impedance of the plasma chamber to 50 ohms, ensuring maximum power transfer from the generator to the chamber. This automatic matching network operates in three independent modes.
In automatic mode, the system continuously compensates for impedance variations within the plasma enclosure.
Manual mode allows the operator to manually adjust the matching capacitance values during operation.
In preset mode, the operator can pre-set capacitance values close to optimal matching conditions at the start, facilitating quicker matching. Various parameters can be adjusted and monitored through the front panel of the control system, with VGA connections for enhanced display options.
This device is particularly useful for plasma production across a range of applications, including different stages of deposition (cleaning, etching, sputtering, etc.) and the fabrication of microelectronic components in the field of nanotechnology.
Automatic Matching Network (25KV) offers seamless adjustment across a wide range of impedances, ensuring optimal performance. It includes comprehensive control and display of all parameters, along with complete remote control capability for added convenience.
Users can choose from three operation modes: manual, automatic, and preset, allowing for flexibility in various applications. The digital display provides information on capacitor locations and alerts for capacitor limitations. In manual mode, a digital rotary encoder on the control panel allows for precise adjustments of the capacitor locations.
The unit control box is designed for easy rack installation, while a separate match box can be positioned near the plasma enclosure for effective operation. Additionally, the system features reserve capacitor sets and inductor change tabs to expand the load impedance range. Adequate shielding is in place to prevent radiation and EMI noise, ensuring the safety and health of the operator.
| Applied Power | 220 (200-240) V, 50 (50-60) Hz (110V is also available) |
| Maximum Input Power | 5000 W for standard load such as sputtergun (limitted to voltage 25KV and current 120 A) |
| Frequency (MHz) | 13.56 |
| Band width | 5% |
| Matching network controlling connector | VGA |
| Working modes | Manual, Automatic, Preset |
| Matching speed | Depending on the load conditions between 5 and 30 seconds and when following the matching point is less than 5 seconds. |
| Controller characteristics | when capacitors reach to the beginning and end, an alarm will be activated.It has two steps (quick and accurate) for the tuning the location of capacitors.It has a digital display of the location of capacitors.It has a LED to show the mode.It has a screw in priest mode to adjust capacitors locationadjustable gain of control loop for achieving optimal speed and stability |
| Circuit topology | L Network |
| Voltage-Current-Capacity of Capacitors | 25KV-120A-500PF |
| Output impedance | A wide range. It performs matching for the standard sputtering cathode to a wide range. |
| Working temperature | 10-40 C |
| Cooling | Air-cooled via Fan and water |
| Input Connector | 7/16 |
| Output connector | direct connection |
| Dimension | 18*48*25 (length*width*height) |
| Weight | about 12 Kg |
| Box Material | Aluminium |
Controller specifications
Matching network controlling connector | VGA |
Adjusting Capacitors | In three modes: Manual, Automatic, Preset |
Displays and outputs | A panel to display online location of capacitors.Automatic deactivator of the device in the event of capacitors reaching first or end.Analog output to show the impedance domain and phase. |
On/Off switch | A button in the front panel of the device control box.The device has two parts. A box for impedance matching and a small box to control the system display. |
Dimensions (cm) | 4.4*22*23 (length*width*height) |
Weight | 1 Kg |
Box material | Aluminium |
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