Sputter Coaters / Vacuum Coating Systems - High Vacuum, Triple Magnetron Target Desk Sputter Coater - DST3-A/S
High Vacuum, Triple Magnetron Target Desk Sputter Coater - DST3-A/S
The High Vacuum, Triple Magnetron Target Desk Sputter Coater-DST3-A/S is a versatile multi-target vacuum coater system, featuring turbo molecular pumping, suitable for depositing a wide range of materials. It comes with a spacious chamber with a diameter of 300 mm and is equipped with three 2” diameter water-cooled cathodes, allowing for extended deposition periods.
This Triple Magnetron Target Desk Sputter Coater is well-equipped with both RF and DC power supplies, enabling it to effectively sputter semiconductors, dielectrics, and various metal targets, including both oxidizing and noble metals. To optimize the RF sputtering process, the system includes an auto-adjustable matching box, which minimizes reflected power.
For enhancing film adhesion to the substrate and improving film structures, there is also an optional feature that allows the application of a 300 V DC bias voltage to the substrate.
Depending on the condition of the cathodes, the DST3 is offered in two distinct models.
DST3-A (Angled Cathodes):
The DST3-A features three angled cathodes that share a common focal point. This configuration allows for simultaneous sputtering from two or three (optional) targets, enabling the formation of alloys or multilayer depositions. In this model, the maximum substrate size is 3 inches.
DST3-S (Straight Cathodes):
The DST3-S model is equipped with three straight 2-inch water-cooled cathodes and is designed for sputtering a single large specimen with a diameter of up to 20 cm or several smaller specimens.
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Hardware:
Automation:
Optional Facilities:
The DST3 vacuum coater features a cylindrical Pyrex vacuum chamber with a 300 mm outer diameter and a height of 200 mm. It is equipped with an internally mounted 90 L/s turbo molecular pump, which is supported by a 6m3/h two-stage rotary vane pump for efficient vacuum operation.
Clean Vacuum
Touch Screen Control
The DST3 comes with a 7” colored touch-screen panel, featuring user-friendly software for seamless control and adjustment of the deposition process data. You can easily monitor the vacuum and coating sequence information, which is displayed as digital data or curves on the touch screen. Additionally, the system stores information on the last 300 coatings in the history page for your convenience.
Sample Holder Stages
The sample holder comes in two standard sizes: 3 inches, which is available in both DST3-A and DST3-S models, and 8 inches, exclusive to the DST3-S. However, users have the flexibility to request custom sizes tailored to their specific requirements. The smaller sample holders are equipped with multiple clamps designed for securely holding small samples during rotation, offering a straightforward and effective solution.
Plasma Cleaner
DST3 can be optionally equipped with a plasma cleaner. Plasma treatment or cleaning involves the removal of organic substances from a substrate's surface or modifying it using ionized gas, known as plasma. This process can alter the substrate's surface properties, enhancing either its hydrophilicity or hydrophobicity to facilitate subsequent depositions effectively. Additionally, applying plasma to the substrate before depositing thin films helps eliminate surface contaminants, such as carbon-based residues and oxides, while improving the adhesion between the substrate and the subsequent layers.
| Table Header | ||
|---|---|---|
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Pumping Speed (l/s) |
90 |
350 |
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Ultimate Pressure (Torr) |
8×10-6 |
3×10-6 |
