Sputter Coaters / Vacuum Coating Systems - High Vacuum Sputter Coater and Carbon/Thermal Evaporator – DSCT-T
High Vacuum Sputter Coater and Carbon/Thermal Evaporator – DSCT-T
The High Vacuum Sputter Coater and Carbon/Thermal Evaporator – DSCT-T is designed as a versatile instrument for Scanning Electron Microscope (SEM) sample preparation. It features three interchangeable heads, allowing it to function as a sputter coater, carbon coater, and thermal evaporator in one unit. This system is capable of depositing a wide range of materials, including gold (Au), platinum/palladium (Pt/Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), and more.
Furthermore, the thermal head of this High Vacuum SEM Coater can also be utilized for cleaning TEM and SEM apertures. Equipped with a Turbomolecular Pump, this coater is capable of producing high-quality uniform films with fine grain sizes. These attributes make it suitable for specimens that demand high-resolution and high-quality characterization, including FE-SEM, EDS/WDS, TEM, and EBSD.
The DSCT-T, known as the Sputter Coater and Carbon/Thermal Evaporator, comes with a 2” magnetron cathode, a high voltage switching DC power supply for sputtering, and a high current power supply for carbon evaporation and thermal evaporation. It is a valuable tool for research and various thin film applications in fields such as micro and nano electronics and sample preparation.
Carbon Evaporation of DSCT-T
The mini-sized coating system, model DSCT-T (DSCT with Thermal Evaporator), is capable of carbon coating to produce uniform thin films on various surfaces using carbon fiber (or optionally, a carbon rod). By passing an electric current through the carbon fiber in either pulsed or flash mode, carbon evaporation is deposited onto the sample. This process effectively reduces the amount of debris typically associated with traditional carbon deposition methods.
Thermal Evaporation
The DSCT-T, Sputter Coater, and Carbon/Thermal Evaporator, come equipped with a thermal head designed for the evaporation of metals with low evaporation temperatures, such as gold, aluminum, silver, and more. This thermal head serves a dual purpose, allowing for the deposition of these metals and facilitating the cleaning of TEM (Transmission Electron Microscopy) apertures.
The thermal evaporation process accommodates a variety of applications. For instance, it can be used in the fabrication of metal films, production of thin-film sensors, manufacturing optical components, and serving the needs of the nano and microelectronics industries, as well as solar cell applications.
Sample Stages
The DSCT-T offers the flexibility of various sample stage configurations to cater to user-specific requirements. These sample stages are designed to be rotatable and adjustable in height, providing ease of use and adaptability. For achieving uniform coating on porous specimens, the option of a sample planetary rotation system is available and highly recommended.
Options and Accessories
The Desk Sputter Coater – DSCT-T offers a range of options and accessories to enhance its capabilities:
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