Automatic Matching Network (15KV)
Automatic Matching Network (15KV) for RF plasma control adjusts the RF-generated impedance of the plasma chamber to 50 ohms, maximizing power transfer from the generator to the chamber. This automatic matching network operates in three distinct modes.
In automatic mode, the system continuously compensates for impedance variations within the plasma enclosure. Manual mode allows the operator to adjust the matching capacitance values during the process. In preset mode, the operator can pre-set capacitance values close to optimal matching conditions at the start, enabling quicker adjustments.
Various parameters can be monitored and adjusted via the front panel of the control system, with VGA connections for enhanced display capabilities. This device is particularly effective for plasma production across various applications, including different stages of deposition (cleaning, etching, sputtering, etc.) and the fabrication of microelectronic components in the field of nanotechnology.
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Automatic Matching Network (15KV) enables precise adjustments across a wide range of impedances, ensuring optimal performance for RF plasma applications. It features comprehensive control and display capabilities for all parameters, along with complete remote control functionality.
The system offers three operational modes: manual, automatic, and preset. A digital display indicates capacitor locations and alerts for any capacitor limitations. In manual mode, operators can make precise adjustments to the capacitor locations using a digital rotary encoder located on the control panel.
The unit control box is designed for easy installation in a rack, while a separate match box can be positioned near the plasma enclosure for effective operation. The network also includes reserve capacitor sets and inductor change tabs to expand the load impedance range. Adequate shielding is implemented to prevent radiation and electromagnetic interference (EMI) noise, ensuring a safe working environment for the operator.
Applied Power | 220 (200-240) V, 50 (50-60) Hz (110V is also availabe) |
Maximum Input Power | 3000 W for standard load such as sputtergun (limitted to voltage 15KV and current 80 A) |
Frequency (MHz) | 13.56 |
Band width | 5% |
Matching network controlling connector | VGA |
Working modes | Manual, Automatic, Preset |
Matching speed | Depending on the load conditions between 5 and 30 seconds and when following the matching point is less than 5 seconds. |
Controller characteristics | when capacitors reach to the beginning and end, an alarm will be activated.It has two steps (quick and accurate) for the tuning the location of capacitors.It has a digital display of the location of capacitors.It has a LED to show the mode.It has a screw in priest mode to adjust capacitors locationadjustable gain of control loop for achieving optimal speed and stability |
Circuit topology | L Network |
Voltage-Current-Capacity of Capacitors | 15KV-80A-500PF |
Output impedance | A wide range.It performs matching for the standard sputtering cathode to a wide range. |
Working temperature | 10-40 C |
Cooling | Air-cooled via Fan and water |
Input Connector | Female N |
Output connector | 7/16 or direct connection |
Dimension | 13*41*17 (length*width*height) |
Weight | about 5 Kg |
Box Material | Aluminium |
Controller specifications
Matching network controlling connector | VGA |
Adjusting Capacitors | In three modes: Manual, Automatic, Preset |
Displays and outputs | A panel to display online location of capacitors.Automatic deactivator of the device in the event of capacitors reaching first or end.Analog output to show the impedance domain and phase. |
On/Off switch | A button in the front panel of the device control box.The device has two parts. A box for impedance matching and a small box to control the system display. |
Dimensions (cm) | 4.4*22*23 (length*width*height) |
Weight | 1 Kg |
Box material | Aluminium |
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