RF Plasma Generator 100W-300W
RF Plasma Generator 100W-300W is highly reliable for industrial and laboratory applications, including deposition, plasma generation, dielectric heating, and melting. Essential in semiconductor manufacturing, these generators play a crucial role in producing integrated circuits (ICs) and chips used in modern computers and electronics. The RF generator, paired with its impedance matching network, forms a complete RF plasma generation assembly. Built to customer specifications, these generators are available in various frequency bands, including 27.12 MHz, 13.56 MHz, and 2 MHz, to meet diverse operational needs.
Why 13.56 MHz?
This frequency is among the most widely used in the industrial, scientific, and medical (ISM) radio bands. It supports high-power applications without interfering with nearby telecommunications systems, as it’s designated for general use. Generators in this band can range from a few milliwatts up to several hundred kilowatts, accommodating various operational demands.
This generator is equipped with a reflected power limiter, ensuring protection and stability during operation. Its air-cooling system delivers over 70% efficiency for DC-to-RF conversion, while a graphical touch-screen interface provides intuitive control, display, and adjustments. Multiple protection measures are included, guarding against reflected power, overheating, overcurrent, and overvoltage, with automatic power limiting capabilities.
With a 0-5 V input for remote power control and an analog output for transmitted and reflected power monitoring, the system offers more than 90% efficiency in models exceeding 300 W. A closed-loop output control stabilizes power over time, and comprehensive shielding prevents radiation and EMI interference, safeguarding both device performance and operator health. The unit is designed for convenient rack installation.
Power supply | 220 V (200-240 V), 50 Hz (50-60 Hz) |
Output frequency | 13.56 MHz |
Protection | Various types (protection against reflected power, overtemperature, overcurrent, and overvoltage), especially reflected power limiter |
Display | Graphic display with touch screen or digital display |
Remote control | Digital RS485 |
Working temperature | 10-40°C |
Cooling | Air conditioned |
Output impedance | 50Ω(resistive) |
Dimensions (cm) | Depends on device output |
Weight | Depends on device output |
Output connector | N – 7/16 |
Box material | Aluminium |
RF generation Models
RFG150 | RFG300 | RFG600 | RFG1000 | RFG2000 | RFG5000 | |
Frequency (MHz) | 13.56 | 13.56 | 13.56 | 13.56 | 13.56 | 13.56 |
Power (W) | 150 | 300 | 600 | 1000 | 2000 | 5000 |
Output Impedance (ohms) | 50 | 50 | 50 | 50 | 50 | 50 |
Connection type | Analog & Digital max485 | Analog & Digital max485 | Analog & Digital max485 | Analog & Digital max485 | Analog & Digital max485 | Analog & Digital max485 |
Front Panel display | LCD | LCD | LCD | LCD | 7segment | 7segment |
Output Connector | N | N | N | N | N | 7/16 |
Touch Screen | Yes | Yes | Yes | Yes | No | No |
Input Power | Single-phase | Single-phase | Single-phase | Single-phase | 3phase | 3phase |
Cooling | air-cooled | air-cooled | air-cooled | air-cooled | air-cooled | air&water-cooled |
How Can We Help You?
Contact our sales team for a quotation.
